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Spherical aberration-corrected scanning transmission electron microscopy characterization reveals that the Re atoms are incorporated at the substitutional Mo sites in the MoS2 lattice. The incorporation of Re atoms leads to n-type doping of MoS2 as evidenced by Kelvin probe force microscope studies. Electrical measurements reveal that the transport properties of the Re-doped monolayer MoS2 is dramatically enhanced as compared with the pristine MoS2. The CVD method developed in this study can be applied to the production of a variety of t
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