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Microelectromechanical system resonant sensors are widely used in high precision applications. Frequency measurement plays an important role in such frequency readout sensors. This paper proposed an improved modified frequency measurement method based on the multi-phase clock (MPC), which can effectively improve the measurement accuracy but does not reduce the output rate. Innovative claims include (1) building a model of measurement error for MPC in which the probability of triggering error under different conditions is calculated, (2)

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