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X-ray detection plays an important role in medical imaging, scientific research, and security inspection. Recently, the β-Ga2O3 single-crystal-based X-ray detector has attracted extensive attention due to its excellent intrinsic properties such as good absorption for X-ray photons, a high breakdown electric field, high stability, and low cost. However, developing a high-performance β-Ga2O3-based X-ray detector remains a challenge because of the large dark current and the high oxygen vacancy concentration in the crystals. In this paper,
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