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Therefore, initially the effect of the Mg amount regarding the crystallinity, Al composition and leisure problems within the p-AlGaN HSL were studied. A growing trend into the lattice-relaxation ratios with increasing Mg levels into the p-AlGaN HSL had been observed. Ultimately, a 40%-60% relaxed and 1.4 μm thick p-AlGaN HSL framework with total threading dislocation densities (total-TDDs) of around ∼8-9 × 108 cm-2 was attained, which almost suits our previous design of a 4 μm thick

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