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In this work the comparative studies of the surface morphology and surface chemistry of SnO2 nanolayers prepared by Spin Coating with subsequent Thermal Oxidation (SCTO) in the temperature range 400÷700C using Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and X-ray Photoelectron Spectroscopy (XPS) methods, are presented. SEM images show that SCTO SnO2 nanolayers contain partly connected irregular structures strongly dependent on the final oxidation temperature, with the interconnected single grains of longitudinal s