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1%BW at 1 MeV, which may have diverse applications in various fields.For a Si-based all-optical spatial terahertz modulator (STM), an enhanced modulation efficiency under low illumination density would be of great significance to exploit the competence of THz technology in real-world applications. We presented here an implementation of such a device by microtexturing and passivating the Si surface, forming a truncated pyramidal array (TPA). This TPA structure with SiO2 passivating coatings not only decreases light reflectance and expands