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In this study, a method for reflection-mode soft x-ray absorption spectroscopy was developed to realize three-dimensional chemical-state imaging. Soft x rays from a pinhole were reflected by the sample, and the magnified image was observed with a two-dimensional detector. This technique was applied to a Co film with an Au-island-covered surface to obtain the surface chemical state images with a spatial resolution of several tens of micrometers. Furthermore, the soft x-ray reflection spectra within and outside the Au layer were extracted
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