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However, lower electrical conductivity limits the enhancement of the ZT value. The porosity effect on the thermoelectrical properties of silicon substrates with nanopores was evaluated. Seebeck coefficient has a maximum value at the porosity of 38% and then decreases at the porosity of 49%, and the electrical conductivity and thermal conductivity decrease with the increase of porosity. At the porosity of 38%, the ZT value of silicon substrates with nanopores can reach to approximately 0.02, which is 7.3 times larger than that of the orig
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