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Film growth rates at different temperatures (from 400 to 700 °C), film thickness, crystalline quality, and surface morphology were investigated. The films deposited on quartz showed high transparency (above 80%) in the visible region and low carbon contamination on the surface (11-13% from XPS), which could easily be removed completely with 2 min of Ar+ sputtering.Severe haze episodes typically occur with concurrent high relative humidity. Here, the vital role of water in promoting the oxidation of SO2 by O2 on carbonaceous soot surface