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Ellipsometric modeling of serially bi-deposited glancing-angle-deposition (GLAD) coatings with a high degree of accuracy is imperative for multilayer coatings. High-precision dispersion curves are demonstrated for a wide variety of applications.Electric field enhancement due to nodular defects within quarter-wave optical thickness multilayer mirrors is impacted by the inclusion diameter, inclusion depth, inclusion composition, nodular shape, multilayer angular bandwidth, multilayer coating materials, number of layers, angle of incidenc