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The catalytic reaction reduces the decomposition temperature of TBAs and TBP by up to 200 °C. In addition, for the growth of GaAs with TBAs and TEGa and for the growth of GaP with TBP and TEGa, a significant decrease of the decomposition temperature with an increasing V/III ratio is observed. This behavior, which is related to an alkyl exchange reaction, gives insights into the low-temperature growth of GaAs and GaP and is converted into an effective V/III ratio. Finally, the growth of GaAs with TTBGa and TBAs is realized at 300 °C belo
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