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The VPFP is used to change the inherent method of forming specimens with the same parameters, which provides a new idea for SLM-forming structures; the test provides data and yields a theoretical research basis for forming the specimens process method.We studied the texturing, roughness, and morphology features of ZnO films grown on the R (11¯02)-, M (101¯-, A (112¯-, and C (0001)-planes of sapphire, as well as their optical and luminescent properties. We showed that the growth conditions, substrate orientation, and the presence of a buffer laye