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Thin-film resonators and scanning probe microscopies (SPM) are usually used on low-frequency mechanical systems at the nanoscale or larger. Generally, off-chip approaches are applied to detect mechanical vibrations in these systems, but these methods are not much appropriate for atomic-thin-layer devices with ultrahigh characteristic frequencies and ultrathin thickness. Primarily, those mechanical devices based on atomic-layers provide highly improved properties, which are inapproachable with conventional nanoelectromechanical systems (