https://pcna-signal.com/can-be....-preoperative-mechan
For verification, a biased electret layer was fabricated during the internal area of a silicon on insulator (SOI) structure dealing with a 2 μm gap because of the large compatibility of silicon micromachining as well as the potassium-ion-electret fabrication strategy. A electret-augmented actuator with an out-of-plane movement membrane layer achieved an audio pressure amount (SPL) of 50 dB optimum with AC input voltage of alone, showing a potential for a
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