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Au is an ideal noble metal as an electrocatalyst for ethanol oxidation reaction owing to its high performance-to-cost ratio. The catalyst usually exists as nanoparticles (NPs) for high surface area to volume ratio. In the present paper, a non-traditional physical approach has been developed to fabricate ultra-small and homogeneous single crystalline Au NPs by ion bombardment in a PIPS system. TEM characterizations show that the Au NPs produced with 5 keV Ar+ are highly strained to form twinned crystals, which accumulate large amount of