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The surface potential differences originating in the substrate can affect the incident electrons through the native oxide film situated on the Cu surface. Scanning low-energy electron microscopy is a powerful tool for mapping local work function differences with a spatial resolution slightly better than 30 nm due to high sensitivity to local electrical potentials.During the process of whole slide imaging, it is necessary to focus thousands of fields of view to obtain a high-quality image. To make the focusing procedure efficient and effe
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