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A mechanism of nanocavitation via interstitial oxygen generation mediated by multiphoton and avanlanche defect ionization is proposed. We demonstrate ultralow-loss geometrical phase optical elements, including geometrical phase prism and lens, and a vector beam convertor in silica glass. © The Author(s) 2020.Direct femtosecond (fs) laser processing is a maskless fabrication technique that can effectively modify the optical, electrical, mechanical, and tribological properties of materials for a wide range of potential applications. Howe
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