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We establish the ultimate limits that quantum theory imposes on the accuracy attainable in optical ellipsometry. We show that the standard quantum limit, as usually reached when the incident light is in a coherent state, can be surpassed with the use of appropriate squeezed states and, for tailored beams, even pushed to the ultimate Heisenberg limit.We develop a dispersive phase filter design framework suitable for compact integration using waveguide Bragg gratings (WBGs) in silicon. Our proposal is to utilize an equivalent "discrete"

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